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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II - In-situ wafer contamination detection through rf-PCD Measurements
Michel, Jurgen, Black, Marcia R., Norga, G. J., Black, Kathryn A., M'saad, Hichem, Kimerling, Lionel C., Lowell, John K., Chen, Ray T., Mathur, Jagdish P.Volume:
2638
Year:
1995
Language:
english
DOI:
10.1117/12.221203
File:
PDF, 237 KB
english, 1995