SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Method of multilayer semiconductor structures cross section preparation for transmission electron microscopy
Karasyov, Vladimir Y., Skornyakov, Alexander V., Kuznetsov, Mikhail G., Sabnis, Anant G., Raaijmakers, Ivo J.Volume:
2637
Year:
1995
Language:
english
DOI:
10.1117/12.221316
File:
PDF, 351 KB
english, 1995