SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Lasers as Tools for Manufacturing of Durable Goods and Microelectronics - Laser maskless formation of submicrometer periodic relief gratings on AIIIBV semiconductor wafers by combination of holographic and surface electromagnetic wave generation methods
Panchenko, Vladislav Y., Khudobenko, Alexander I., Seminogov, Vladimir N., Dubowski, Jan J., Mazumder, Jyotirmoy, Migliore, Leonard R., Roychoudhuri, Chandrasekhar, Schaeffer, Ronald D.Volume:
2703
Year:
1996
Language:
english
DOI:
10.1117/12.237765
File:
PDF, 572 KB
english, 1996