SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microelectronic Structures and MEMS for Optical Processing II - Fabrication and characterization of a Fabry-Perot-based chemical sensor
Han, Jaeheon, Neikirk, Dean P., Clevenger, Marvin B., McDevitt, John T., Motamedi, M. Edward, Bailey, WayneVolume:
2881
Year:
1996
Language:
english
DOI:
10.1117/12.251246
File:
PDF, 484 KB
english, 1996