SPIE Proceedings [SPIE Electronic Imaging '97 - San Jose,...

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SPIE Proceedings [SPIE Electronic Imaging '97 - San Jose, CA (Saturday 8 February 1997)] Active Matrix Liquid Crystal Displays Technology and Applications - Low-temperature activation method of poly-Si films using rapid thermal annealing

Hirano, Kiichi, Sotani, Naoya, Hasegawa, Isao, Nohda, Tomoyuki, Abe, Hisashi, Hamada, Hiroki, Voutsas, Tolis, King, Tsu-Jae
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Volume:
3014
Year:
1997
Language:
english
DOI:
10.1117/12.270285
File:
PDF, 404 KB
english, 1997
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