SPIE Proceedings [SPIE Lasers and Optics in Manufacturing III - Munich, Germany (Monday 16 June 1997)] Optical Inspection and Micromeasurements II - New grazing incidence microscope for the measurement of topography with a 2lambda-algorithm
Koerner, Klaus, Fritz, Holger, Nyarsik, Lajos, Fuchs, Hans-Hellmuth, Gorecki, ChristopheVolume:
3098
Year:
1997
Language:
english
DOI:
10.1117/12.281177
File:
PDF, 416 KB
english, 1997