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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III - Arc-induced gate oxide breakdown in plasma etching process

Song, Jungwoo, Lee, Heegee, Lee, Jung Hoon, Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-Dieter
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Volume:
3216
Year:
1997
Language:
english
DOI:
10.1117/12.284697
File:
PDF, 349 KB
english, 1997
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