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SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - 3D micro-EDM machining technique
Kuo, Chia-Lung, Chen, Shung-Tong, Wu, Ying-Jeng E., Yen, Albert T., Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293543
File:
PDF, 618 KB
english, 1997