SPIE Proceedings [SPIE 5th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 1 March 1998)] Smart Structures and Materials 1998: Smart Electronics and MEMS - High-etch-rate deep anisotropic plasma etching of silicon for MEMS fabrication
Pandhumsoporn, Tam, Wang, Lei, Feldbaum, Michael, Gadgil, Prashant, Puech, Michel, Maquin, Philippe, Varadan, Vijay K., McWhorter, Paul J., Singer, Richard A., Vellekoop, Michael J.Volume:
3328
Year:
1998
Language:
english
DOI:
10.1117/12.320159
File:
PDF, 3.46 MB
english, 1998