SPIE Proceedings [SPIE Design, Test, and Microfabrication...

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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Processing of complex microsystems: a micro mass spectrometer

Siebert, Peter, Petzold, G., Mueller, Joerg, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.
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Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341247
File:
PDF, 5.27 MB
english, 1999
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