SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - Pulsed laser deposition of high-quality tribological coatings
Radhakrishnan, Gouri, Adams, Paul M., Speckman, Donna M., Dubowski, Jan J., Helvajian, Henry, Kreutz, Ernst-Wolfgang, Sugioka, KojiVolume:
3618
Year:
1999
Language:
english
DOI:
10.1117/12.352707
File:
PDF, 833 KB
english, 1999