SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Fabrication and reliability testing of Ti/TiN heaters
De Moor, Piet, Witvrouw, Ann, Simons, Veerle, De Wolf, Ingrid, Smith, James H., Karam, Jean MichelVolume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361232
File:
PDF, 1.15 MB
english, 1999