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SPIE Proceedings [SPIE Symposium on High-Power Lasers and Applications - San Jose, CA (Saturday 22 January 2000)] Laser Applications in Microelectronic and Optoelectronic Manufacturing V - Ion-source-assisted pulsed-laser deposition of carbon nitride thin films
He, Z. F., Lu, Yongfeng, Mai, ZhiHong, Ren, ZhongMin, Helvajian, Henry, Sugioka, Koji, Gower, Malcolm C., Dubowski, Jan J.Volume:
3933
Year:
2000
Language:
english
DOI:
10.1117/12.387585
File:
PDF, 377 KB
english, 2000