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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Production of silicon diaphragms by precision grinding
Prochaska, Andrzej, Baine, Paul T., Mitchell, S. J. N., Gamble, Harold S., Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396440
File:
PDF, 1.37 MB
english, 2000