![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Pivoting micromirror designs for large orientation angles
Garcia, Ernest J., Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396480
File:
PDF, 2.46 MB
english, 2000