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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Metrology-based Control for Micro-Manufacturing - High-resolution IC inspection technique
Ippolito, Stephen B., Swan, Anna K., Goldberg, Bennett B., Unlu, M. Selim, Tobin, Jr., Kenneth W., Lakhani, FredVolume:
4275
Year:
2001
Language:
english
DOI:
10.1117/12.429355
File:
PDF, 239 KB
english, 2001