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SPIE Proceedings [SPIE Shanghai - DL tentative - Shanghai, China (Monday 1 April 1991)] International Conference on Thin Film Physics and Applications - Ta/Al alloy thin film medium-power attenuator
Yang, Bangchao, Jia, Yu M., Zhou, Shixun, Wang, YonglingVolume:
1519
Year:
1991
Language:
english
DOI:
10.1117/12.47252
File:
PDF, 102 KB
english, 1991