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SPIE Proceedings [SPIE Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life - Novosibirsk, Russia (Monday 9 September 2002)] Seventh International Symposium on Laser Metrology Applied to Science,Industry, and Everyday Life - Interferometric system for measuring position and orientation of a positioning stage
Zhang, Jie, Iwata, Koichi, Kikuta, Hisao, Park, Choong S., Chugui, Yuri V., Bagayev, Sergei N., Weckenmann, Albert, Osanna, P. HerbertVolume:
4900
Year:
2002
Language:
english
DOI:
10.1117/12.484571
File:
PDF, 566 KB
english, 2002