SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - Nanocal calibration and pitch recertification of a Hitachi microscale standard
Yeremin, Dmitry, Silver, Richard M., Nikitin, Arkady, Sicignano, Al, Sandy, Matt, Goldburt, Tim, Tracy, BryanVolume:
5375
Year:
2004
Language:
english
DOI:
10.1117/12.536095
File:
PDF, 163 KB
english, 2004