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SPIE Proceedings [SPIE Temp Symposium Entry - Smolyan, Bulgaria (Monday 1 September 2003)] Eighth International Conference on Laser and Laser Information Technologies - Comparison of growth rate, roughness, and surface morphology of Cu and W thin films prepared by pulsed laser deposition
Michalka, Miroslav, Panchenko, Vladislav Y., Sabotinov, Nikola V., Uherek, Frantisek, Bruncko, JaroslavVolume:
5449
Year:
2003
Language:
english
DOI:
10.1117/12.563095
File:
PDF, 316 KB
english, 2003