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SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 13 September 2004)] 24th Annual BACUS Symposium on Photomask Technology - A proposal for an MCC (Multi-column cell with lotus root lens) system to be used as a mask-making e-beam tool
Yasuda, Hiroshi, Haraguchi, Takeshi, Yamada, Akio, Staud, Wolfgang, Weed, J. TracyVolume:
5567
Year:
2004
Language:
english
DOI:
10.1117/12.568255
File:
PDF, 651 KB
english, 2004