SPIE Proceedings [SPIE 11th Annual BACUS Symposium on...

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SPIE Proceedings [SPIE 11th Annual BACUS Symposium on Photomask Technology - Sunnyvale, United States (Wednesday 25 September 1991)] 11th Annual BACUS Symposium on Photomask Technology - Continuous-slope phase-shift transition

Pfau, Anton K., Scheckler, Edward W., Newmark, David M., Neureuther, Andrew R., McGinnis, Kevin C.
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Volume:
1604
Year:
1992
Language:
english
DOI:
10.1117/12.56953
File:
PDF, 431 KB
english, 1992
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