SPIE Proceedings [SPIE NDE for Health Monitoring and...

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SPIE Proceedings [SPIE NDE for Health Monitoring and Diagnostics - San Diego, CA (Sunday 14 March 2004)] Testing, Reliability, and Application of Micro- and Nano-Material Systems II - Materials characterization of micro-devices

Schreiber, J’rgen, Meyendorf, Norbert, Baaklini, George Y., Bendjus, Beatrice, K÷hler, Bernd, Michel, Bernd, Melov, Valeri, Baumbach, Tilo
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Volume:
5392
Year:
2004
Language:
english
DOI:
10.1117/12.570272
File:
PDF, 368 KB
english, 2004
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