SPIE Proceedings [SPIE LAMILADIS '91: International Workshop--Laser Microtechnology and Laser Diagnostics of Surfaces - Chernovstsy, Ukraine (Tuesday 16 April 1991)] LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces - Commercial excimer laser for scientific researches and microtechnologies
Alimpiev, Sergey S., Likhansky, Sergey V., Obidin, Alexey Z., Vartapetov, Serge K., Veselovsky, Igor A., Koroteev, Nikolai I., Panchenko, Vladislav Y.Volume:
1723
Year:
1992
Language:
english
DOI:
10.1117/12.58638
File:
PDF, 196 KB
english, 1992