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SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Film thickness measurement of ultrathin film using UV wavelength light
Kondo, Nobuyuki, Fujiwara, Nariaki, Abe, Atsushi, Postek, Jr., Michael T.Volume:
1673
Year:
1992
Language:
english
DOI:
10.1117/12.59825
File:
PDF, 630 KB
english, 1992