SPIE Proceedings [SPIE Nondestructive Evaulation for Health Monitoring and Diagnostics - San Diego, CA (Sunday 6 March 2005)] Testing, Reliability, and Application of Micro- and Nano-Material Systems III - FIB based measurements for material characterization on MEMS structures
Vogel, Dietmar, Geer, Robert E., Meyendorf, Norbert, Lieske, Daniel, Gollhardt, Astrid, Baaklini, George Y., Michel, Bernd, Keller, Juergen, Sabate, Neus, Morante, Joan Ramon, Michel, BerndVolume:
5766
Year:
2005
Language:
english
DOI:
10.1117/12.599891
File:
PDF, 1.81 MB
english, 2005