SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II - Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
Mann, K., Kyrala, George A., Gauthier, Jean-Claude J., Barkusky, F., Bayer, A., MacDonald, Carolyn A., Khounsary, Ali M., Peth, C., Toettger, H., Feigl, T., Kaiser, N.Volume:
5918
Year:
2005
Language:
english
DOI:
10.1117/12.614989
File:
PDF, 1.22 MB
english, 2005