![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - High-rate deposition of optical coatings by closed-field magnetron sputtering
Gibson, D. R., Amra, Claude, Kaiser, Norbert, Brinkley, I., Waddell, E. M., Macleod, H. Angus, Walls, J. M.Volume:
5963
Year:
2005
Language:
english
DOI:
10.1117/12.624774
File:
PDF, 635 KB
english, 2005