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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining and Microfabrication Process Technology XI - Microstereolithography production of integrated Hadamard mask structures
Robinson, Christopher J., Southwell, Larinn M., Palmer, Jeremy A., Smith, Mark W., Sinclair, Michael B., Chavez, Bart D., Stucker, Brent E., Medina, Francisco, Wicker, Ryan B., Maher, Mary-Ann, StewarVolume:
6109
Year:
2006
Language:
english
DOI:
10.1117/12.646417
File:
PDF, 1015 KB
english, 2006