SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - Nanoscale pattern transfer for templates, NEMS, and nano-optics
Olynick, Deirdre L., Maher, Mary-Ann, Stewart, Harold D., Liddle, J. Alexander, Harteneck, Bruce D., Chiao, Jung-Chih, Suleski, Thomas J., Cabrini, Stefano, Rangelow, Ivo W., Johnson, Eric G., Nordin,Volume:
6462
Year:
2007
Language:
english
DOI:
10.1117/12.705033
File:
PDF, 472 KB
english, 2007