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SPIE Proceedings [SPIE Photonics North 2006 - Quebec City, Canada (Monday 19 June 2006)] Photonics North 2006 - Study on a symmetrically supported electrostatic actuated micro-platform
You, Jianliang, Mathieu, Pierre, Packirisamy, Muthukumaran, Stiharu, IonVolume:
6343
Year:
2006
Language:
english
DOI:
10.1117/12.708253
File:
PDF, 383 KB
english, 2006