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SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] MEMS/MOEMS Technologies and Applications III - Characterizations of microcantilever chemical sensors based on SOI material
Hu, Fangrong, Chiao, Jung-Chih, Chen, Xuyuan, Wang, Dajia, Qiu, Chuankai, Zhou, Zhaoying, Li, Xinxin, Wang, Aina, Gao, Hongtao, Yao, JunVolume:
6836
Year:
2007
Language:
english
DOI:
10.1117/12.758232
File:
PDF, 360 KB
english, 2007