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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Microfluidics, BioMEMS, and Medical Microsystems VI - Novel 3D micromirror for miniature optical bio-robe SiOB assembly
Singh, Janak, Wang, Wanjun, Vauchier, Claude, Xu, Yingshun, Premachandran, C. S., Jason, Teo Hui Siang, Chen, NanguangVolume:
6886
Year:
2008
Language:
english
DOI:
10.1117/12.762544
File:
PDF, 424 KB
english, 2008