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SPIE Proceedings [SPIE SPIE LASE: Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 24 January 2009)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VII - Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers
Meunier, Michel, Alekel, Theodore, Foster, David H., Holmes, Andrew S., Niino, Hiroyuki, Crist, Jordan, Gu, BoVolume:
7201
Year:
2009
Language:
english
DOI:
10.1117/12.809754
File:
PDF, 691 KB
english, 2009