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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, CA (Sunday 2 August 2009)] Nanoengineering: Fabrication, Properties, Optics, and Devices VI - Environment for thin-film manufacturing process development for product engineering of micro and nano devices
Ortloff, Dirk, Dobisz, Elizabeth A., Eldada, Louay A., Hahn, Kai, Popp, Jens, Schmidt, Thilo, Brück, RainerVolume:
7402
Year:
2009
Language:
english
DOI:
10.1117/12.825606
File:
PDF, 848 KB
english, 2009