![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Advances in Metrology for X-Ray and EUV Optics III - At-wavelength optical metrology development at the ALS
Yuan, Sheng, Assoufid, Lahsen, Takacs, Peter Z., Goldberg, Kenneth A., Yashchuk, Valeriy V., Asundi, Anand K., Celestre, Richard, Mochi, Iacopo, Macdougall, James, Morrison, Gregory Y., Smith, Brian VVolume:
7801
Year:
2010
Language:
english
DOI:
10.1117/12.859946
File:
PDF, 2.61 MB
english, 2010