SPIE Proceedings [SPIE Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China (Sunday 8 August 2010)] Sixth International Symposium on Precision Engineering Measurements and Instrumentation - White-light spectral scanning interferometry for surface measurement system
Wang, Chenchen, Cao, Nailiang, Lu, Jin, Guan, JiayanVolume:
7544
Year:
2010
Language:
english
DOI:
10.1117/12.885436
File:
PDF, 244 KB
english, 2010