SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Optical Manufacturing and Testing IX - Analytical process design for chemo-mechanical polishing of glass aspheres
Waechter, Daniel, Burge, James H., Fähnle, Oliver W., Dambon, Olaf, Klocke, Fritz, Williamson, RayVolume:
8126
Year:
2011
Language:
english
DOI:
10.1117/12.893300
File:
PDF, 1.19 MB
english, 2011