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SPIE Proceedings [SPIE Hague International Symposium - The Hague, Netherlands (Monday 30 March 1987)] Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection - Prediction Of Shelf-Lives Of Positive Photoresists Based On Accelerated Aging Techniques Kinetic Evaluation Of Various Parameters
Wijbenga, G., Chen, M. S., Fine, S. A., Stover, Harry L., Wittekoek, StefanVolume:
811
Year:
1987
Language:
english
DOI:
10.1117/12.975601
File:
PDF, 719 KB
english, 1987