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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Interferometric methods for assessment of toroidal diffraction grating performance
Baker, Phillip C., Bergamini, Paolo, Berger, Thomas E., Timothy, J. Gethyn, Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140578
File:
PDF, 604 KB
english, 1993