SPIE Proceedings [SPIE SPIE'S 1993 Symposium on...

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SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III - Absorber roughness effect in XRL image formation

Guo, Jerry Z., Cerrina, Franco, Patterson, David O.
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Volume:
1924
Year:
1993
Language:
english
DOI:
10.1117/12.146515
File:
PDF, 562 KB
english, 1993
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