SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - High-repetition-rate KrF lithography excimer laser with narrow bandwidth below 2 pm
Lokai, Peter, Rebhan, Ulrich, Oesterlin, Peter, Kahlert, Hans-Juergen, Basting, Dirk, Pol, VictorVolume:
1264
Year:
1990
Language:
english
DOI:
10.1117/12.20205
File:
PDF, 378 KB
english, 1990