SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser 3D Manufacturing III - Improvement in contact resistance of 4H-SiC by excimer laser doping using silicon nitride films
Gu, Bo, Helvajian, Henry, Piqué, Alberto, Kojima, R., Ikenoue, H., Suwa, M., Ikeda, A., Nakamura, D., Asano, T., Okada, T.Volume:
9738
Year:
2016
Language:
english
DOI:
10.1117/12.2212021
File:
PDF, 533 KB
english, 2016