SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Force measurements of polysilicon thermal microactuators
Reid, J. Robert, Bright, Victor M., Comtois, John H., Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
Language:
english
DOI:
10.1117/12.250716
File:
PDF, 2.80 MB
english, 1996