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SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Tuesday 13 May 1997)] Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997 - Oxygen concentration distribution determination in silicon wafers by semiconductor IR laser spectroscopy
Darchuk, Sergey D., Sizov, Fiodor F., Svechnikov, Sergey V., Valakh, Mikhail Y.Volume:
3359
Year:
1998
Language:
english
DOI:
10.1117/12.306260
File:
PDF, 239 KB
english, 1998