SPIE Proceedings [SPIE Optics in Computing '98 - Brugge, Belgium (Wednesday 17 June 1998)] Optics in Computing '98 - Technological aspects of deep proton lithography for the fabrication of micro-optical elements for photonics in computing applications
Tuteleers, Patrik, Vynck, Pedro, Ottevaere, Heidi, Baukens, Valerie, Verschaffelt, Guy, Kufner, Stefan, Kufner, Maria, Hermanne, Alex, Veretennicoff, Irina P., Thienpont, Hugo, Chavel, Pierre H., MillVolume:
3490
Year:
1998
Language:
english
DOI:
10.1117/12.308977
File:
PDF, 1.21 MB
english, 1998