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SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) - Boston, MA (Sunday 1 November 1998)] Microrobotics and Micromanipulation - Comparison of 3D surfaces produced by 248-nm and 193-nm excimer laser radiation
Toenshoff, Hans K., Graumann, Christoph, Rinke, Marcus, Hesener, Hanno, Kulik, Christian, Sulzmann, Armin, Nelson, Bradley J.Volume:
3519
Year:
1998
Language:
english
DOI:
10.1117/12.325742
File:
PDF, 2.39 MB
english, 1998