SPIE Proceedings [SPIE Optical Systems Design and Production - Berlin, Germany (Wednesday 26 May 1999)] Advances in Optical Interference Coatings - X-ray and AFM studies of ultrathin films for EUV and soft x-ray applications
Asadchikov, Victor E., Duparre, Angela, Kozhevnikov, Igor V., Krivonosov, Yury S., Sagitov, Spartak I., Amra, Claude, Macleod, H. AngusVolume:
3738
Year:
1999
Language:
english
DOI:
10.1117/12.360105
File:
PDF, 278 KB
english, 1999