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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Materials and Device Characterization in Micromachining II - Characterization of micromachined structures: comparison of measurement and theory
Aceto, Steven C., Gutierrez, Adolfo O., Simkulet, Michelle D., Krawczyk, Jr., Thomas W., Lienhard, Michael, Lundgren, Andrew, Houghton, Brandon, Patti, David, Vladimirsky, Yuli, Friedrich, Craig R.Volume:
3875
Year:
1999
Language:
english
DOI:
10.1117/12.360474
File:
PDF, 1.02 MB
english, 1999