![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachine Technology for Diffractive and Holographic Optics - Planar optical system design and fabrication
Yun, Zhisheng, Lam, Yee Loy, Chan, Yuen Chuen, Zhou, Yan, Zhao, Liping, Liaw, ChinYi, Lee, Sing H., Cox, J. AllenVolume:
3879
Year:
1999
Language:
english
DOI:
10.1117/12.360520
File:
PDF, 861 KB
english, 1999